IPS, Waseda University
2-7 Hibikino, Wakamatsuku, Kitakyushushi,
Fukuoka 808-0135 Japan
◆Equipments
（Principal instruments in our Lab.）
・ Microwave plasma CVD
・ Antenna-type microwave plasma CVD
・ Ion beam sputtering
・ Molecular beam epitaxy system
・ Electronic measurement system
・ I-V prober system
・ Hall measurement system
・ Vacuum annealing system
Equipments in following colabration centers are also used
・ KSRP Semiconductor center
・ Measurement and analysis center in University of Kitakyusyu
（Principal instruments in our Lab.）
・ Microwave plasma CVD
・ Antenna-type microwave plasma CVD
・ Ion beam sputtering
・ Molecular beam epitaxy system
・ Electronic measurement system
・ I-V prober system
・ Hall measurement system
・ Vacuum annealing system
Equipments in following colabration centers are also used
・ KSRP Semiconductor center
・ Measurement and analysis center in University of Kitakyusyu
バナースペース
Ueda Lab.
2-7 Hibkino, Wakamatsuku,
Kitakyushushi, Fukuoka 808-0135, JAPAN
TEL: +81-93-692-5176
E-mail:k-ueda[AT]waseda.jp
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